Tetrachlorosilane

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Tetrachlorosilane (SiCl₄) when used with silicon is the starting material for the manufacture of fused silica fiber. Silicon tetrachloride is sometimes used as an intermediate in the fabrication or purification of silicon.

Applications

In advanced material fabrication, tetrachlorosilane can be used for the chemical vapor deposition (CVD) of silicon oxide, nitride or carbide layers.^[1]

References

1. http://encyclopedia.airliquide.com