Nitrogen trifluoride

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Nitrogen trifluoride (NF₃) is a colorless, stable, toxic gas with a moldy odor under ambient conditions. Nitrogen trifluoride is preferred over fluorine because of its relative ease of handling at ambient conditions.^[1]

Applications

In semiconductor fabrication, nitrogen trifluoride is useful for plasma or thermal cleaning of CVD reactors; NF₃ is also a selective reagent for silicon dioxide etching.^[2]

References

1. http://www.spectragases.com/content/NF3.htm
2. http://encyclopedia.airliquide.com