Silane
From GAWDAwiki
Silane (SiH4) is an active gas for silicon containing a layered coating on flat or hollow glass.
Applications
Silane is used in semiconductor manufacturing as a source of silicon in polycrystalline silicium deposition for interconnects or masking; growth of epitaxial silicon; and Chemical Vapor Deposition (CVD) of silicon dioxide, silicon nitride, silicon carbide, and refractory metal silicides. Silane is also used for the manufacturing of amorphous silicon devices for photosensitive drums or solar cells.[1]
